2007
Hard masking layer stack for use in semiconductor memory device, has carbon layer arranged on layer to be structured, and covering layer arranged on intermediate layer, where intermediate layer is thicker than covering layer
Manger, D.; Gutsch, M.; Lattard, L.; Roessiger, M.; Vogt, M.; Boubekeur, H.; Verhoeven, M.; Nagel, N.; Tatry, T.; Caspary, D.; Markert, M.; Bauch, L.; BLAWID, S; BLAWID, S.País:Alemanha
Tipo:PRIVILEGIO DE INOVACAO PI
Categoria:Processo
Registro:DE102007012334